Vibration-resistant phase-shifting interferometry

Applied Optics

Volumn 35, Issue 34, 1996, Pages 6655-6662

  Deck, Leslie ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

Interferometry; Phase shifting; Vibration

Indexed keywords

EID: 0037975459     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.006655     Document Type: Article

References (13)

1. J. E. Greivenkamp and J. H. Bruning, “Phase shifting interferometry,” in Optical Shop Testing,” D. Malacara, ed. (Wiley, New York, 1992), Chap. 14.
2. R. Smythe and R. Moore, “Instantaneous phase measuring interferometry,” Opt. Eng. 23, 361-364 (1984).
3. P. L. Wizinowich, “Phase shifting interferometry in the presence of vibration: a new algorithm and system,” Appl. Opt. 29, 3271-3279 (1990).
4. C. T. Farrell and M. A. Player, “Phase-step insensitive algorithms for phase-shifting interferometry,” Meas. Sci. Tech. 5, 648-652 (1994).
5. I. Kong and S. Kim, “General algorithm of phase-shifting interferometry by iterative least-squares fitting,” Opt. Eng. 34, 183-188 (1995).
6. G. Lai and T. Yatagai, “Generalized phase-shifting interferometry,” J. Opt. Soc. Am. A 8, 822-827 (1991).
7. P. de Groot, “Vibration in phase-shifting interferometry,” J. Opt. Soc. Am. A 12, 354-365 (1995).
8. J. Schwider, R. Burow, K.-E. Elssner, J. Gizanna, R. Spolac-zyk, and K. Merkel, “Digital wave-front measuring interferometry: some systematic error sources,” Appl. Opt. 22, 3421-3432 (1983).
9. J. E. Greivenkamp, “Generalized data reduction for heterodyne interferometry,” Opt. Eng. 23, 350-352 (1984).
10. P. de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window,” Appl. Opt. 34, 4723-4730 (1995).
11. K. Kinnstaetter, A. W. Lohmann, J. Schwider, and N. Streibl, “Accuracy of phase shifting interferometry,” Appl. Opt. 27, 5082-5089 (1988).
12. C. Joenathan, “Phase-measuring interferometry: new methods and error analysis,” Appl. Opt. 33, 4147-4155 (1994).
13. P. de Groot and L. Deck, “Numerical simulations of vibration in phase shifting interferometry,” Appl. Opt. 35, 2172-2178 (1996).