Characterization of amorphous carbon films as total-reflection mirrors for XUV free electron lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4782, Issue , 2002, Pages 113-121

  Jacobi, Sandra ^a   Steeg, Barbara ^b   Wiesmann, Jörg ^c   Störmer, Michael ^a   Feldhaus, Josef ^b   Bormann, Rüdiger ^a   Michaelsen, Carsten ^c  

^a INSTITUTE OF MATERIALS RESEARCH   (Germany)

^b DESY   (Germany)

^c Incoatec GmbH ^*  (Germany)

Author keywords

FEL (free electron laser); Magnetron sputtering; Mirror; Radiation damage; SEM (Scanning Electron Microscopy); SFM (Scanning Force Microscopy); Soft X rays; Thermal stability; X ray optics; XRR (X ray reflectometry)

Indexed keywords

CARBON; FREE ELECTRON LASERS; LINEAR ACCELERATORS; MAGNETRON SPUTTERING; MIRRORS; RADIATION DAMAGE; SCANNING ELECTRON MICROSCOPY; TEST FACILITIES; THERMODYNAMIC STABILITY; X RAYS;

SCANNING FORCE MICROSCOPY;

AMORPHOUS FILMS;

EID: 0037965475     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.450460     Document Type: Conference Paper

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