A hollow cathode discharge modification as a source of sputtered atoms and their ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 204, Issue , 2003, Pages 387-391

  Zhechev, D ^a   Zhemenik, V I ^b,c   Tileva, S ^a   Mishinsky, G V ^b   Pyrvanova, N ^a  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b JOINT INSTITUTE FOR NUCLEAR RESEARCH   (Russian Federation)

^c INSTITUTE FOR NUCLEAR RESEARCH   (Ukraine)

Author keywords

Conical bottom; Hollow cathode discharge; Ion source; Opto galvanic; Sputtering

Indexed keywords

ATOMIC BEAMS; CATHODES; ELECTRON BEAMS; FISSION REACTIONS; ION SOURCES; PARTICLE BEAM INJECTION; POLARIZATION; QUANTUM THEORY; SPECTROSCOPIC ANALYSIS;

CATHODE DISCHARGE;

SPUTTERING;

EID: 0037883265     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01996-1     Document Type: Conference Paper

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