Deposition of AlN layers by collimation magnetron sputtering

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1298-1303

  Miernik, Krzysztof ^a   Walkowicz, Jan ^a   Smolik, Jerzy ^a  

^a NATIONAL RESEARCH INSTITUTE   (Poland)

Author keywords

Coatings; Collimator; Magnetron sputtering

Indexed keywords

EID: 0037879542     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00262-4     Document Type: Article

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