Enhancement of multilayer coated normal incidence gratings in the extreme ultraviolet using a CNx smoothing layer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4854, Issue , 2002, Pages 61-71

  Stern, Robert A ^a   Shing, Lawrence ^a   Chung, Yip Wah ^b   Guruz, Murat ^c  

^a LOCKHEED MARTIN   (United States)

^b Northwestern University   (United States)

^c IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASTROPHYSICS; ATOMIC FORCE MICROSCOPY; LIGHT ABSORPTION; ULTRAVIOLET RADIATION;

MULTILAYER COATED NORMAL INCIDENCE GRATINGS; REFLECTIVITY MEASUREMENTS;

DIFFRACTION GRATINGS;

EID: 0037855974     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.459817     Document Type: Conference Paper

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