The Marangoni convection and the oxygen concentration in Czochralski-grown silicon

Journal of Crystal Growth

Volumn 254, Issue 3-4, 2003, Pages 298-304

  Xu, Yuesheng ^a   Liu, Caichi ^a   Wang, Haiyun ^a   Hao, Qiuyan ^a  

^a HEBEI UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

A1. Convection; A2. Magnetic field assisted Czochralski method; A2. Microgravity conditions; B1. Elemental solids; B2. Semiconducting materials; B2. Semiconducting silicon

Indexed keywords

HEAT CONVECTION; MAGNETIC FIELD EFFECTS; OXYGEN; PERMANENT MAGNETS; SEMICONDUCTING SILICON;

MACRO-CONVECTION;

CRYSTAL GROWTH FROM MELT;

EID: 0037850714     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(03)01169-2     Document Type: Article

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