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Volumn , Issue , 1986, Pages
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PLASMA DEPOSITED THIN FILMS.
[No Author Info available]
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON - THIN FILMS;
FILMS - DIELECTRIC;
PHOTOGRAPHIC REPRODUCTION - XEROGRAPHY;
PLASMAS - APPLICATIONS;
SEMICONDUCTING SILICON COMPOUNDS - APPLICATIONS;
FORMATION/COMPOSITION/MICROSTRUCTURE KINETICS;
HYDROGENATED AMORPHOUS SILICON;
PHOTOVOLTAIC STRUCTURES;
PLASMA DEPOSITION PROCESSES;
XEROGRAPHIC APPLICATIONS;
SEMICONDUCTING FILMS;
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EID: 0022937505
PISSN: None
EISSN: None
Source Type: Book
DOI: None Document Type: Book |
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Times cited : (431)
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References (0)
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