Defect generation in low-energy ion-assisted thermal deposited lithium fluoride films

Journal of Non-Crystalline Solids

Volumn 322, Issue 1-3, 2003, Pages 111-116

  Cricenti, A ^a   Montereali, R M ^b   Mussi, V ^a,c   Nichelatti, E ^d   Pilloni, L ^d   Scaglione, S ^d   Somma, F ^c  

^a CNR   (Italy)

^b ENEA   (Italy)

^c ROMA TRE UNIVERSITY   (Italy)

^d ENEA C R CASACCIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; FILM GROWTH; ION BOMBARDMENT; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

NANOCLUSTER FORMATION;

LITHIUM COMPOUNDS;

EID: 0037772451     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(03)00189-3     Document Type: Conference Paper

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