Influence of the preparation conditions on the properties of CuInS2 films deposited by one-stage RF reactive sputtering

Thin Solid Films

Volumn 431-432, Issue , 2003, Pages 126-130

  He, Y B ^a,b   Kramer T ^a   Polity, A ^a   Hardt, M ^a   Meyer, B K ^a  

^a JUSTUS LIEBIG UNIVERSITY   (Germany)

^b HUBEI UNIVERSITY   (China)

Author keywords

CuInS2; Preparation conditions; RF sputtering; Thin film

Indexed keywords

ADHESION; COPPER COMPOUNDS; ELECTRIC PROPERTIES; GRAIN SIZE AND SHAPE; SPUTTER DEPOSITION; SUBSTRATES; THERMAL DIFFUSION IN SOLIDS;

RADIO FREQUENCY (RF) REACTIVE SPUTTERING;

THIN FILMS;

EID: 0037768551     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00193-7     Document Type: Conference Paper

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