Ion-induced frequency shift of ∼1100 cm-1 IR vibration in implanted SiO2: Compaction versus bond-breaking

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 1101-1105

  Amekura, H ^a   Umeda, N ^b   Okubo, N ^b   Kishimoto, N ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Bond breaking; Coherent multi layer reflection model; Infrared reflection spectroscopy; Penetration effect; Radiation induced compaction; SiO2

Indexed keywords

COMPACTION; HEAVY IONS; INFRARED RADIATION; INFRARED SPECTROSCOPY; SILICA;

BOND-BREAKING;

ION IMPLANTATION;

EID: 0037736596     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00919-4     Document Type: Conference Paper

References (17)

1. EerNisse E.P. J. Appl. Phys. 45:1974;167.
2. Devine R.A.B. Nucl. Instr. and Meth. B. 91:1994;378.
3. Devine R.A.B. J. Vac. Sci. Technol. A. 6:1988;3154.
4. Piao F., Oldham W.G., Haller E.E. J. Non-Cryst. Solids. 276:2000;61.
5. Garrido B., Samitier J., Bota S., Dominguez C., Montserrat J., Morante J.R. J. Non-Cryst. Solids. 187:1995;101.
6. Tung Y.-S., Ueda A., Mu R., Wu M., Chen J., Gu Z., Henderson D.O., Collins W.E., White C.W., Zhur R. Nucl. Instr. and Meth. B. 141:1998;279.
7. Magurder R.H. III, Morgan S.H., Weeks R.A., Zuhr R.A. J. Non-Cryst. Solids. 120:1990;241.
8. Hosono H. J. Appl. Phys. 69:1991;8079.
9. Arnold G.W., Brow R.K., Myers D.R. J. Non-Cryst. Solids. 120:1990;234.
10. N. Umeda, V.V. Bandourko, V.N. Vasilets, N. Kishimoto, Nucl. Instr. and Meth. B, these Proceedings. doi:10.1016/S0168-583X(03)-00815-2.
11. Meldrum A., Boatner L.A., White C.W. Nucl. Instr. and Meth. B. 178:2001;7.
12. H. Amekura, N. Umeda, Y. Takeda, N. Kishimoto, unpublished.
13. Ziegler J.F., Biersack J.P., Littmark U. The Stopping and Range of Ions in Solids. 1985;Pergamon, New York, http://www.srim.org/.
14. Fukumi K., Chayahara A., Yamanaka H., Fujii K., Hayakawa J., Satou M. J. Non-Cryst. Solids. 163:1993;59.
15. Martinet C., Devine R.A.B. J. Appl. Phys. 77:1995;4343.
16. Hirakawa A., Usui H., Yagi K. Appl. Phys. Lett. 54:1989;1106.
17. Potter R.F. Palik E.D. Handbooks of Optical Constants of Solids. 1985;Academic, San Diego. (Chapter 2). [blank_line]