A near-field planar apertured probe array for optical near-field memory

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3467, Issue , 1998, Pages 258-267

  Kourogi, M ^a,b,c   Yatsui, T ^a   Ishimura, S ^a   Lee, M B ^c   Atoda, N ^c   Tsutsui, K ^a   Ohtsu, M ^a,b,c  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^c National Institute for Materials Science   (Japan)

Author keywords

Anisotropic wet etching; Fiber probe; Near field optical memory; Near field optical storage; Photolithography; Planar apertured probe array; Spherical lens

Indexed keywords

ETCHING; LIGHT PROPAGATION; MAGNETIC HEADS; METALLIC FILMS; OPTICAL COMMUNICATION; OPTICAL FIBERS; OPTICAL INSTRUMENT LENSES; PHOTOLITHOGRAPHY; PROBES; SILICON WAFERS; THIN FILMS;

ANISOTROPIC WET ETCHING; FIBER PROBE; NEAR-FIELD OPTICAL MEMORY; NEAR-FIELD PLANAR APERTURED PROBE ARRAY; PLANAR APERTURED PROBE ARRAY; SPHERICAL LENS;

OPTICAL DATA STORAGE;

EID: 0037693860     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.326827     Document Type: Conference Paper

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