Review of multilayer normal-incidence gratings operating at 9 nm - 40 nm wavelengths

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4782, Issue , 2002, Pages 224-229

  Seely, John F ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; MULTILAYERS; SPECTROMETERS; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION;

MULTILAYER COATINGS;

DIFFRACTION GRATINGS;

EID: 0037626155     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.451353     Document Type: Conference Paper

References (14)

1. J. F. Seely, M. P. Kowalski, W. R. Hunter, T. W. Barbee, Jr., R. G. Cruddace, and J. C. Rife, "Normal-incidence efficiencies in the 115-340 Å wavelength region of replicas of the Skylab 3600 line/mm grating with multilayer and gold coatings," Appl. Opt. 34, 6453-6458 (1995).
2. J. F. Seely, R. G. Cruddace, M. P. Kowalski, W. R. Hunter, T. W. Barbee, J. C. Rife, R. Ely, and K. G. Stilt, "Polarization and efficiency of a concave multilayer grating in the 135-250 Å region and in normal-incidence and Seya-Namioka mounts," Appl. Opt. 34, 7347-7354 (1995).
3. J. F. Seely, M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, J. C. Rife, and W. R. Hunter, "Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150 Å region," Appl. Opt. 36, 8206-8213 (1997).
4. M. P. Kowalski, T. W. Barbee, K. F. Heidemann, H. Gursky, J. C. Rife, W. R. Hunter, G. G. Fritz, and R. C. Cruddace, "Efficiency calibration of the first multilayer-coated holographic ion-etched flight grating for a sounding rocket high-resolution spectrometer," Appl. Opt. 38, 6487-6493 (1999).
5. J. F. Seely, "Multilayer grating for the Extreme Ultraviolet Spectrometer (EIS)," in X-Ray Optics, Instruments, and Missions IV, ed. by R. Hoover and A. Walker, Proc. SPIE 4138, 174-181 (2000).
6. R. J. Thomas, R. A. M. Keski-Kuha, W. M. Neupert, C. E. Condor, and J. S. Gum, "Extreme ultraviolet performance of a multilayer coated high-resolution toroidal grating," Appl. Opt. 30, 2245-2251 (1991).
7. L. I. Goray and J. F. Seely, "Efficiencies of master, replica, and multilayer gratings for the soft-x-ray-extreme ultraviolet range: modeling based on the modified integral method and comparisons with measurements," Appl. Opt. 41, 1434-1445 (2002).
8. A. L. Henke, E. M. Gullikson, and J. C. Davis, "X-ray interactions: photoabsorption, scattering, transmission, and reflection at E=50-30,000 eV, Z=1-92," At. Data Nucl. Data Tables 54, 181-342 (1993). Updated optical constants were obtained from the Internet site at http://cindy.lbl.gov/optical constants.
9. Yu. A. Uspenskii, J. F. Seely, N. L. Popov, A. V. Vinogradov, Yu. P. Pershin, and V. V. Kondratenko, "New method for the determination of EUV optical constants in reactive materials: application to Sc and Ti," Opt. Lett. (submitted).
10. J. F. Seely, Yu. A. Uspenskii, Yu. P. Pershin, V. V. Kondratenko, and A. V. Vinogradov, "Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38 nm wavelength," Appl. Opt. 41, 1846-1851 (2002).
11. W. R. Hunter, J. F. Seely, M. P. Kowalski, J. C. Rife, and T. W. Barbee, Jr., "Grazing-incidence efficiencies in the 28-42 Å wavelength region of replicas of the Skylab 3600 line/mm concave grating with multilayer and gold coatings," Appl. Opt. 36, 6411-6415 (1997).
12. J. F. Seely, C. Montcalm, S. Baker, and S. Bajt, "High efficiency MoRu/Be multilayer coated gratings operating near normal incidence in the 11.1-12.0 nm wavelength range," Appl. Opt. 40, 5565-5574 (2001).
13. C. Montcalm, S. Bajt, and J. F. Seely, "MoRu-Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength," Opt. Lett. 26, 125-127 (2001).
14. B. Sae-Lao, S Bajt, C. Montcalm, and J. F. Seely, "Performance of normal-incidence molybdenum-yttrium multilayer-coated diffraction grating at a wavelength of 9 nm," Appl. Opt. 41, 2394-2400 (2002).