Hermetic chemical vapor deposition coatings for environmental sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4639, Issue , 2002, Pages 152-159

  Taylor, Craig A ^a   Chiu, Wilson K S ^a  

^a UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

CVD; Hermetic coating; Optical fiber sensors; Thin film

Indexed keywords

HERMETIC DEVICES; HYDROCARBONS; OPTICAL COATINGS; OPTICAL FIBERS; OPTICAL SENSORS; POLYMERS; RAMAN SPECTROSCOPY; SURFACE ROUGHNESS; THIN FILMS;

HERMETIC COATINGS;

CHEMICAL VAPOR DEPOSITION;

EID: 0036380301     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.481336     Document Type: Conference Paper

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