Determination of the electron temperature profile above the evaporative source in an ion plating discharge by spatially resolved optical emission spectroscopy

Thin Solid Films

Volumn 434, Issue 1-2, 2003, Pages 157-161

  Wilson, A D ^a   Davison, A ^a   Leyland, A ^a   Matthews, A ^a   Fancey, K S ^a  

^a UNIVERSITY OF HULL   (United Kingdom)

Author keywords

Electron temperature; Evaporative source; Optical emission spectroscopy

Indexed keywords

ELECTRONS; EMISSION SPECTROSCOPY; EVAPORATION; THERMAL EFFECTS;

OPTICAL EMISSION SPECTROSCOPY;

THIN FILMS;

EID: 0037601701     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00140-8     Document Type: Article

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