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Volumn 414, Issue 1, 2002, Pages 7-12

Ion plating discharges: Evidence of cluster formation during metal evaporation

Author keywords

Ion plating; Mass spectroscopy; Metal clusters

Indexed keywords

CATHODES; COOLING; ELECTRIC DISCHARGES; EVAPORATION; IONS; THIN FILMS;

EID: 0036647865     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00335-8     Document Type: Article
Times cited : (6)

References (9)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.