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Volumn 414, Issue 1, 2002, Pages 7-12
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Ion plating discharges: Evidence of cluster formation during metal evaporation
a a a a a a |
Author keywords
Ion plating; Mass spectroscopy; Metal clusters
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Indexed keywords
CATHODES;
COOLING;
ELECTRIC DISCHARGES;
EVAPORATION;
IONS;
THIN FILMS;
MASS SPECTROSCOPY;
ELECTROPLATING;
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EID: 0036647865
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(02)00335-8 Document Type: Article |
Times cited : (6)
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References (9)
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