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Volumn 24, Issue 2, 2003, Pages 57-65

The benefits of dynamic reaction cell ICP-MS technology to determine ultra trace metal contamination levels in high purity phosphoric and sulfuric acid

Author keywords

[No Author keywords available]

Indexed keywords

PHOSPHORIC ACID; SULFURIC ACID; TRACE METAL;

EID: 0037566445     PISSN: 01955373     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (7)

References (13)
  • 1
    • 0038564982 scopus 로고    scopus 로고
    • International Technology Roadmap for Semiconductor (ITRS) http://public.itrs.net (2001).
    • (2001)
  • 2
    • 0038598634 scopus 로고    scopus 로고
    • Semiconductor Equipment and Materials International, San Jose, CA USA
    • Book of SEMI Standards (BOSS), Semiconductor Equipment and Materials International, San Jose, CA USA.
    • Book of SEMI Standards (BOSS)
  • 11
    • 0038564981 scopus 로고    scopus 로고
    • Covered by US Patent Number 6140638
    • Covered by US Patent Number 6140638.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.