Determining critical trace elements in highpurity phosphoric acid

MICRO

Volumn 15, Issue 8, 1997, Pages 39-42

  Aleksejczyk, Robert A ^a,b,c   Gibilisco, Donald ^a,d,e,f  

^a FMC CORPORATION   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^d FMC's Analyt Technology Department

^e The College of New Jersey   (United States)

^f SEMI Std' Proc Chemicals Division

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; MASS SPECTROMETRY; PHOSPHORIC ACID; PLASMAS; SAMPLING;

HIGH PURITY PHOSPHORIC ACID; INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY; MICROCONCENTRIC NEBULIZER;

TRACE ANALYSIS;

EID: 0031235336     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (2)

1. Book of SEMI Standards (BOSS), Mountain View, CA, Semiconductor Equipment and Materials International, 1996.
2. Jacksier T, Gluodenis TJ Jr., and Thomas RJ, "Determining Critical Trace Elements in High-Purity Hydrochloric Acid by ICP-MS Alone," MICRO, 14(3):63-68, 1996.