|
Volumn 4852, Issue 2, 2002, Pages 827-838
|
Wide field imaging interferometry testbed III - Metrology subsystem
c
NONE
|
Author keywords
Absolute encoder; Alignment; Delay line; Interferometer; Metrology; Servo; Testbed; Wide field imaging
|
Indexed keywords
ENVIRONMENTAL IMPACT;
IMAGE SENSORS;
IMAGING SYSTEMS;
INTERFEROMETERS;
MONITORING;
PERTURBATION TECHNIQUES;
POSITION CONTROL;
POSITION MEASUREMENT;
SIGNAL RECEIVERS;
TEMPERATURE MEASUREMENT;
DISPLACEMENT MEASURING INTERFEROMETERS;
OPTICAL ALIGNMENT TOOLS;
OPTICAL ENCODERS;
OPTICAL POWER MONITORS;
TEMPERATURE SENSORS;
WIDE FIELD IMAGING INTERFEROMETRY;
INTERFEROMETRY;
|
EID: 0037502863
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.460948 Document Type: Conference Paper |
Times cited : (14)
|
References (9)
|