A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology

Computer Methods in Applied Mechanics and Engineering

Volumn 192, Issue 5-6, 2003, Pages 593-612

  Causin, Paola ^a   Sacco, Riccardo ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

Compressible and incompressible fluid mechanical problems; Dual mixed hybrid finite element methods; Semiconductor technology; Thermal oxidation process

Indexed keywords

COMPRESSIBLE FLOW; COMPUTATIONAL METHODS; INCOMPRESSIBLE FLOW; SEMICONDUCTOR DEVICE MANUFACTURE; THERMOOXIDATION;

STRESS FIELDS;

CONTINUUM MECHANICS;

COMPUTATIONAL FLUID DYNAMICS; FLUID MECHANICS; MATHEMATICAL ANALYSIS; MODELING; OXIDATION;

HYDRODYNAMICS; METHODOLOGY; OXIDATION; SIMULATION; THEORY; THERMAL ANALYSIS;

EID: 0037474367     PISSN: 00457825     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0045-7825(02)00574-1     Document Type: Article

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