Application of platelet CVD diamond to micromachine elements

Surface and Coatings Technology

Volumn 163-164, Issue , 2003, Pages 566-570

  Noguchi, Hiroyuki ^a   Takeuchi, Sadao ^a   Murakawa, Masao ^a  

^a NIPPON INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

CVD diamond; Micromachine elements; Quasi hexagonal platelet

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMBUSTION; DIAMONDS; PLASTICS; SYNTHESIS (CHEMICAL);

PLATELETS;

MICROMACHINING;

CHEMICAL VAPOR DEPOSITION; DIAMOND COATING; MACHINE ELEMENT;

EID: 0037472585     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00665-5     Document Type: Article

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