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Volumn 163-164, Issue , 2003, Pages 318-322

Structures and properties of BON and multilayered TiN/BON thin films preparedby PAMOCVD method

Author keywords

BON and TiN BON thin films; High Hardness; Low frequency RF PAMOCVD

Indexed keywords

METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROHARDNESS; MULTILAYERS; PLASMA SOURCES;

FILM THICKNESS;

THIN FILMS;

BORON NITRIDE; HARDNESS; INORGANIC COATING; MECHANICAL PROPERTY; MICROSTRUCTURE; TITANIUM NITRIDE;

EID: 0037472559 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(02)00636-9 Document Type: Article

Times cited : (5)

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