Fracture of polycrystalline silicon

Materials Science and Engineering: A

Volumn 351, Issue 1-2, 2003, Pages 166-173

  Brodie, R C ^a   Bahr, D F ^a  

^a WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

Fractography; Fracture toughness; Grain size; Silicon

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRACK PROPAGATION; DUCTILE FRACTURE; FRACTURE TOUGHNESS; GRAIN SIZE AND SHAPE; MICROSTRUCTURE; STRESS INTENSITY FACTORS;

CRACK TIP RADII;

POLYSILICON;

FRACTURE;

EID: 0037466820     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(02)00829-8     Document Type: Article

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