The step structure of the Si(5 5 7) surface

Thin Solid Films

Volumn 428, Issue 1-2, 2003, Pages 129-132

  Henzler, M ^a   Zhachuk, R ^a,b  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^b Institute of Semiconductor   (Russian Federation)

Author keywords

Lithographic method; Low energy electron diffraction; Vicinal surface

Indexed keywords

COMPUTER SIMULATION; LITHOGRAPHY; LOW ENERGY ELECTRON DIFFRACTION; SCANNING TUNNELING MICROSCOPY; SILICON; SURFACE STRUCTURE;

STEP STRUCTURE;

SURFACE PHENOMENA;

EID: 0037457183     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01236-1     Document Type: Conference Paper

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