Preparation of TaN/C (carbon microcoils)/TaN composite microtubes and TaN microtubes by vapor phase diffusion treatment of carbon microcoils

Materials Science and Engineering: A

Volumn 346, Issue 1-2, 2003, Pages 29-33

  Yang, S ^a   Ueshima, N ^a   Motojima, S ^a  

^a GIFU UNIVERSITY   (Japan)

Author keywords

Carbon microcoil; Chemical vapor deposition; Microtube; Tantalum nitride

Indexed keywords

CHEMICAL MODIFICATION; DIFFUSION; ELECTRIC CONDUCTIVITY; HEAT TREATMENT; TANTALUM CARBIDE;

MICROCOILS; MICROTUBES;

COMPOSITE MATERIALS;

VAPOR DEPOSITION;

EID: 0037447494     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(02)00532-4     Document Type: Article

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