ArF-excimer laser induced chemical vapour deposition of amorphous hydrogenated SiGeC films

Applied Surface Science

Volumn 208-209, Issue 1, 2003, Pages 682-687

  Lopez E ^a   Chiussi, S ^a   Serra, C ^a   Serra, J ^a   Gonzalez P ^a   Leon B ^a   Perez Amor M ^a  

^a UNIVERSITY OF VIGO   (Spain)

Author keywords

Band gap engineering; Excimer laser; Laser induced CVD; SiGeC

Indexed keywords

BANDWIDTH; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; EXCIMER LASERS; FILM GROWTH; HYDROGENATION; OPTOELECTRONIC DEVICES; SILICON COMPOUNDS; STOICHIOMETRY; SUBSTRATES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLASS; MULTILAYERS; SEMICONDUCTING SILICON COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

BAND GAP ENGINEERING; SOLID PHASE EPITAXY;

SEMICONDUCTING FILMS; THIN FILMS;

EID: 0037443272     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)01426-5     Document Type: Conference Paper

References (15)

1. Olesinski R.W., Abbaschian G.J. Bull. Alloy Phase Diag. 5:1984;484.
2. Soref R.A. J. Appl. Phys. 70:1991;2470.
3. Strane J.W., Stein H.J., Lee S.R., Doyle B.L., Picraux S.T., Mayer J.W. Appl. Phys. Lett. 63:1993;2786.
4. Eberl K., Iyer S.S., Zollner S., Tsang J.C., LeGoues F.K. Appl. Phys. Lett. 60:1992;3033.
5. Mi J., Warren P., Letorneau P., Judelewicz M., Gailhanou M., Dutoit M., Dubois C., Dupuy J.C. Appl. Phys. Lett. 67:1995;259.
6. Kouvetakis J., Todd M., Chandrasekhar D., Smith D.J. Appl. Phys. Lett. 65:1994;2960.
7. Chiussi S., Serra C., Serra J., González P., León B., Urban S., Andrä G., Bergmann J., Falk F., Fabbri F., Fornarini L., Martelli S., Rinaldi F. Appl. Surf. Sci. 186:2002;166.
8. Frangis N., Van Landuyt J., Larciprete R., Martelli S., Borsella E., Chiussi S., Castro J., León B. Appl. Phys. Lett. 72:1998;2877.
9. Chiussi S., González P., Serra J., León B., Pérez-Amor M. Appl. Surf. Sci. 106:1996;75.
10. Delplancke M.P., Powers J.M., Vandentop G.J., Salmeron M., Somorjai G.A. J. Vac. Sci. Technol. A. 9:1991;450.
11. Redondas X., González P., León B., Pérez-Amor M. Vacuum. 52:1999;51.
12. Abe K., Yagi S., Okabayashi T., Yamada A., Konagai M. Jpn. J. Appl. Phys. 40:2001;4440.
13. Heintze M., Eberhardt K., Tress O., Bauer G.H. J. Non-Cryst. Solids. 137/138:1991;53.
14. Herman I.P. Chem. Rev. 89:1989;132.
15. J.R. McNesby, H. Okabe, Advances in Photochemistry, vol. 3, Interscience, New York, 1964, 157 pp.