Micro-patterning of photosensitive gel films using the two ultraviolet beam interference method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3943, Issue , 2003, Pages 38-46

  Kintaka, Kenji ^a   Nishii, Junji ^a   Tohge, Noboru ^a  

^a OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO-PATTERNING; ULTRAVIOLET BEAM INTERFERENCE METHODS;

DIFFRACTION GRATINGS; GAS LASERS; LIGHT INTERFERENCE; OPTICAL FILMS; PHOTOSENSITIVITY; SUBSTRATES; THIN FILMS; ZIRCONIA;

SOL-GELS;

EID: 0033688431     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)