Improved Fourier method of thickness determination by x-ray reflectivity

Journal of Applied Physics

Volumn 93, Issue 4, 2003, Pages 1974-1977

  De Peralta, L Grave ^a   Temkin, H ^a  

^a Texas Tech University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER TRANSFORMS; INTERFACES (MATERIALS); KINEMATICS; X RAYS;

X-RAY REFLECTIVITY;

LIGHT REFLECTION;

EID: 0037442450     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1536722     Document Type: Article

References (4)

1. V. Holý, U. Pietsh, and T. Baumbach, High-Resolution X-Ray Scattering from Thin Films and Multilayers (Springer, New York, 1999), p. 62.
2. M. A. Marcus, Appl. Phys. Lett. 72, 659 (1998).
3. T. Macrander, S. Lau, K. Strege, and N. G. Chu, Appl. Phys. Lett. 52, 1985 (1988).
4. A. Gibaud, in X-Ray and Neutron Reflectivity: Principles and Applications, edited by J. Daillant and A. Gibaut (Springer, New York, 1999), p. 99.