Simplified analysis of some complex film stacks in x-ray reflectivity

Applied Physics Letters

Volumn 72, Issue 6, 1998, Pages 659-661

  Marcus, Matthew A ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013341231     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120838     Document Type: Article

References (9)

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8. The fringes from the thick Al layer are too close together to be measured by a typical reflectometer.
9. B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993).