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Volumn 206, Issue 1-4, 2003, Pages 196-208

Influence of the working atmosphere on the excimer laser ablation of Al 2 O 3 -TiC ceramics

Author keywords

Ablation rate; Al 2 O 3 TiC ceramics; Laser micromachining

Indexed keywords

ALUMINA; ATTENUATION; EXCIMER LASERS; LASER ABLATION; LASER PULSES; MICROMACHINING; MOLECULAR WEIGHT; NANOSTRUCTURED MATERIALS; TITANIUM CARBIDE;

EID: 0037441181     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)01217-5     Document Type: Article
Times cited : (14)

References (30)
  • 1
    • 0012584810 scopus 로고    scopus 로고
    • Plasma ignition thresholds in UV laser ablation plumes
    • COLA'99
    • Clarke P., Dyer P.E., Key P.H., Snelling H.V. Plasma ignition thresholds in UV laser ablation plumes. Appl. Phys. A. 69(COLA'99):1999;117-120.
    • (1999) Appl. Phys. A , vol.69 , pp. 117-120
    • Clarke, P.1    Dyer, P.E.2    Key, P.H.3    Snelling, H.V.4
  • 2
    • 0030735767 scopus 로고    scopus 로고
    • Observation of plasma shielding by measuring transmitted and reflected laser pulse temporal profiles
    • Mao X., Russo R.E. Observation of plasma shielding by measuring transmitted and reflected laser pulse temporal profiles. Appl. Phys. A. 64:1997;1-6.
    • (1997) Appl. Phys. A , vol.64 , pp. 1-6
    • Mao, X.1    Russo, R.E.2
  • 3
    • 0031251257 scopus 로고    scopus 로고
    • Mechanisms of absorption in pulsed excimer laser-induced plasma
    • Song K.H., Xu X. Mechanisms of absorption in pulsed excimer laser-induced plasma. Appl. Phys. A. 65:1997;477-485.
    • (1997) Appl. Phys. A , vol.65 , pp. 477-485
    • Song, K.H.1    Xu, X.2
  • 4
    • 0030168756 scopus 로고    scopus 로고
    • Investigations of extinction coefficients during excimer laser ablation and their interpretation in terms of Rayleigh scattering
    • Schittenhelm H., Callies G., Berger P., Hügel H. Investigations of extinction coefficients during excimer laser ablation and their interpretation in terms of Rayleigh scattering. J. Phys. D: Appl. Phys. 29:1996;1564-1575.
    • (1996) J. Phys. D: Appl. Phys. , vol.29 , pp. 1564-1575
    • Schittenhelm, H.1    Callies, G.2    Berger, P.3    Hügel, H.4
  • 6
    • 0032630308 scopus 로고    scopus 로고
    • Modeling of UV pulsed-laser ablation of metallic targets
    • Amoruso S. Modeling of UV pulsed-laser ablation of metallic targets. Appl. Phys. A. 69:1999;323-332.
    • (1999) Appl. Phys. A , vol.69 , pp. 323-332
    • Amoruso, S.1
  • 8
    • 0030563059 scopus 로고    scopus 로고
    • Preferential vaporization and plasma shielding during nano-second laser ablation
    • Mao X., Chan W.-T., Caetano M., Shannon M.A., Russo R.E. Preferential vaporization and plasma shielding during nano-second laser ablation. Appl. Surf. Sci. 96-98:1996;126-130.
    • (1996) Appl. Surf. Sci. , vol.96-98 , pp. 126-130
    • Mao, X.1    Chan, W.-T.2    Caetano, M.3    Shannon, M.A.4    Russo, R.E.5
  • 9
    • 0000260842 scopus 로고    scopus 로고
    • in: J. Miller, R. Haglund (Eds.), Academic Press, San Diego
    • R. Russo, X. Mao, in: J. Miller, R. Haglund (Eds.), In Laser Ablation and Desorption, vol. 30, Academic Press, San Diego, 1998, pp. 375-412.
    • (1998) In Laser Ablation and Desorption , vol.30 , pp. 375-412
    • Russo, R.1    Mao, X.2
  • 10
    • 0032072260 scopus 로고    scopus 로고
    • Pulsed laser ablation of metals
    • Lunney J.G., Jordan R. Pulsed laser ablation of metals. Appl. Surf. Sci. 127-129:1998;941-946.
    • (1998) Appl. Surf. Sci. , vol.127-129 , pp. 941-946
    • Lunney, J.G.1    Jordan, R.2
  • 13
    • 0033905520 scopus 로고    scopus 로고
    • Strategy of nanocluster and nanostructure synthesis by conventional laser ablation
    • Marine W., Patrone L., yanchuk B.L., Sentis M. Strategy of nanocluster and nanostructure synthesis by conventional laser ablation. Appl. Surf. Sci. 154-155:2000;345-352.
    • (2000) Appl. Surf. Sci. , vol.154-155 , pp. 345-352
    • Marine, W.1    Patrone, L.2    Yanchuk, B.L.3    Sentis, M.4
  • 16
    • 0012482445 scopus 로고
    • in: D.B. Chrisey, G.K. Hubler (Eds.), Wiley, New York
    • L. Chen, in: D.B. Chrisey, G.K. Hubler (Eds.), In Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994, pp. 168-198.
    • (1994) In Pulsed Laser Deposition of Thin Films , pp. 168-198
    • Chen, L.1
  • 18
    • 0012538252 scopus 로고
    • Study of surface reflectivity of polymide (Kapton H) utilizing double-pulsed 308 nm laser radiation
    • Mihailov S., Duley W. Study of surface reflectivity of polymide (Kapton H) utilizing double-pulsed 308 nm laser radiation. J. Appl. Phys. 74(5):1993;2510-2517.
    • (1993) J. Appl. Phys. , vol.74 , Issue.5 , pp. 2510-2517
    • Mihailov, S.1    Duley, W.2
  • 20
    • 0032072068 scopus 로고    scopus 로고
    • Modeling of expansion of laser-evaporated matter in argon, helium and nitrogen and the condensation of clusters
    • Callies G., Schittenhelm H., Berger P., Hügel H. Modeling of expansion of laser-evaporated matter in argon, helium and nitrogen and the condensation of clusters. Appl. Surf. Sci. 127-129:1998;134-141.
    • (1998) Appl. Surf. Sci. , vol.127-129 , pp. 134-141
    • Callies, G.1    Schittenhelm, H.2    Berger, P.3    Hügel, H.4
  • 25
    • 0029289474 scopus 로고
    • Nanosecond and femtosecond excimer-laser ablation of oxide ceramics
    • Ihlemann J., Scholl A., Schmidt H., Wolff-Rottke B. Nanosecond and femtosecond excimer-laser ablation of oxide ceramics. Appl. Phys. A. 60:1995;411-417.
    • (1995) Appl. Phys. A , vol.60 , pp. 411-417
    • Ihlemann, J.1    Scholl, A.2    Schmidt, H.3    Wolff-Rottke, B.4
  • 26
    • 0028498918 scopus 로고
    • Attenuation of laser radiation by particles during laser materials processing
    • Hansen F., Duley W.W. Attenuation of laser radiation by particles during laser materials processing. J. Laser Appl. 6:1994;137.
    • (1994) J. Laser Appl. , vol.6 , pp. 137
    • Hansen, F.1    Duley, W.W.2
  • 28
    • 0019011059 scopus 로고
    • Improved Mie scattering algorithms
    • Wiscombe W. Improved Mie scattering algorithms. Appl. Opt. 19:1980;1505-1509.
    • (1980) Appl. Opt. , vol.19 , pp. 1505-1509
    • Wiscombe, W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.