Novel nanosized patterning technology based on electropulsed scanning probe microscopy

Materials Science and Engineering C

Volumn 23, Issue 1-2, 2003, Pages 77-80

  Brogueira, P ^a   Melo, L V ^a  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

AFM; Deposition; SPM

Indexed keywords

DEPOSITION; MICROSCOPIC EXAMINATION; SILICON;

ELECTRICAL PULSES;

NANOTECHNOLOGY;

COATING;

EID: 0037439817     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0928-4931(02)00236-9     Document Type: Article

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