-
1
-
-
0003926828
-
-
Academic, New York
-
S. P. Murarka, Silicides for VLSI Applications (Academic, New York, 1983); Metallization: Theory and Practice for VLSI and ULSI (Butterworth-Heinemann, Boston, 1993).
-
(1983)
Silicides for VLSI Applications
-
-
Murarka, S.P.1
-
2
-
-
0003634478
-
-
Butterworth-Heinemann, Boston
-
S. P. Murarka, Silicides for VLSI Applications (Academic, New York, 1983); Metallization: Theory and Practice for VLSI and ULSI (Butterworth-Heinemann, Boston, 1993).
-
(1993)
Metallization: Theory and Practice for VLSI and ULSI
-
-
-
3
-
-
36449000090
-
-
S. Dhar, T. Som, Y. N. Mohapatra, and V. N. Kulkarni, Appl. Phys. Lett. 67, 1700 (1995).
-
(1995)
Appl. Phys. Lett.
, vol.67
, pp. 1700
-
-
Dhar, S.1
Som, T.2
Mohapatra, Y.N.3
Kulkarni, V.N.4
-
7
-
-
0036140623
-
-
S. Dhar, M. Milosavljevic, N. Bibic, and K. P. Lieb, Phys. Rev. B 65, 024 109 (2001).
-
(2001)
Phys. Rev. B
, vol.65
, pp. 24109
-
-
Dhar, S.1
Milosavljevic, M.2
Bibic, N.3
Lieb, K.P.4
-
8
-
-
0021939442
-
-
edited by M. I. Current and D. K. Sadana (SPIE, Washington)
-
R. S. Bhattacharya, A. K. Rai, H. Rashid, A. Ezis, and P. P. Pronko, in Proceedings of the International Society for Optical Engineering, edited by M. I. Current and D. K. Sadana (SPIE, Washington, 1985), Vol. 530, p. 138.
-
(1985)
Proceedings of the International Society for Optical Engineering
, vol.530
, pp. 138
-
-
Bhattacharya, R.S.1
Rai, A.K.2
Rashid, H.3
Ezis, A.4
Pronko, P.P.5
-
9
-
-
84913818283
-
-
R. S. Bhattacharya, A. K. Rai, A. Ezis, M. H. Rashid, and P. P. Pronko, J. Vac. Sci. Technol. A 3, 2316 (1985).
-
(1985)
J. Vac. Sci. Technol. A
, vol.3
, pp. 2316
-
-
Bhattacharya, R.S.1
Rai, A.K.2
Ezis, A.3
Rashid, M.H.4
Pronko, P.P.5
-
10
-
-
0032477047
-
-
W. Assmann, M. Dobler, D. K. Avasthi, S. Kruijer, H. D. Mieskes, and H. Nolte, Nucl. Instrum. Methods Phys. Res. B 146, 271 (1998).
-
(1998)
Nucl. Instrum. Methods Phys. Res. B
, vol.146
, pp. 271
-
-
Assmann, W.1
Dobler, M.2
Avasthi, D.K.3
Kruijer, S.4
Mieskes, H.D.5
Nolte, H.6
-
11
-
-
0003412161
-
-
Pergamon, New York
-
J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985), Vol. 1.
-
(1985)
The Stopping and Range of Ions in Solids
, vol.1
-
-
Ziegler, J.F.1
Biersack, J.P.2
Littmark, U.3
-
14
-
-
0043066495
-
-
T. R. Ananthraman, H. L. Luo, and W. Klement, Jr., Trans. Am. Inst. Min. Eng. 283, 2014 (1965).
-
(1965)
Trans. Am. Inst. Min. Eng.
, vol.283
, pp. 2014
-
-
Ananthraman, T.R.1
Luo, H.L.2
Klement W., Jr.3
-
16
-
-
36449007665
-
-
V. R. Palkar, S. C. Purandare, S. P. Pai, S. Chattopadhyay, P. R. Apte, R. Pinto, and M. S. Multani, Appl. Phys. Lett. 68, 1582 (1996).
-
(1996)
Appl. Phys. Lett.
, vol.68
, pp. 1582
-
-
Palkar, V.R.1
Purandare, S.C.2
Pai, S.P.3
Chattopadhyay, S.4
Apte, P.R.5
Pinto, R.6
Multani, M.S.7
-
17
-
-
85067536079
-
-
communicated
-
T. Som, B. Satpati, P. V. Satyam, P. Ayyub, D. Kabiraj, and V. N. Kulkarni, Nucl. Instr. Method. Phys. Res. B (communicated).
-
Nucl. Instr. Method. Phys. Res. B
-
-
Som, T.1
Satpati, B.2
Satyam, P.V.3
Ayyub, P.4
Kabiraj, D.5
Kulkarni, V.N.6
-
18
-
-
0032476990
-
-
H. Huber, W. Assmann, S. A. Karamian, H. D. Mieskes, H. Nolte, E. Gazis, M. Kokkoris, S. Kossionides, R. Vlastou, R. Grötzschel, A. Müklich, and W. Prusseit, Nucl. Instrum. Methods Phys. Res. B 146, 309 (1998).
-
(1998)
Nucl. Instrum. Methods Phys. Res. B
, vol.146
, pp. 309
-
-
Huber, H.1
Assmann, W.2
Karamian, S.A.3
Mieskes, H.D.4
Nolte, H.5
Gazis, E.6
Kokkoris, M.7
Kossionides, S.8
Vlastou, R.9
Grötzschel, R.10
Müklich, A.11
Prusseit, W.12
|