Electromigration model for the prediction of lifetime based on the failure unit statistics in aluminum metallization

Journal of Applied Physics

Volumn 93, Issue 2, 2003, Pages 883-892

  Park, Jong Ho ^a   Ahn, Byung Tae ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ALUMINUM; FAILURE ANALYSIS; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; METALLIZING; PROBABILITY;

MEDIAN TIME TO FAILURE (MTTF);

ELECTROMIGRATION;

EID: 0037439425     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1528311     Document Type: Article

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