|
Volumn 74, Issue 1-2, 1998, Pages 75-81
|
Perforated support foils with pre-defined hole size, shape and arrangement
|
Author keywords
Automation; Calibration; Electron microscopy; Perforated support foil
|
Indexed keywords
AUTOMATION;
CALIBRATION;
LITHOGRAPHY;
METAL FOIL;
PERFORATED SUPPORT FOILS;
ELECTRON MICROSCOPY;
BIOPOLYMER;
PROTEINASE;
ARTICLE;
AUTOMATION;
ELECTRON MICROSCOPY;
SEMICONDUCTOR;
TECHNOLOGY;
|
EID: 0032126299
PISSN: 03043991
EISSN: None
Source Type: Journal
DOI: 10.1016/S0304-3991(98)00025-4 Document Type: Article |
Times cited : (64)
|
References (27)
|