메뉴 건너뛰기




Volumn 74, Issue 1-2, 1998, Pages 75-81

Perforated support foils with pre-defined hole size, shape and arrangement

Author keywords

Automation; Calibration; Electron microscopy; Perforated support foil

Indexed keywords

AUTOMATION; CALIBRATION; LITHOGRAPHY; METAL FOIL;

EID: 0032126299     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(98)00025-4     Document Type: Article
Times cited : (64)

References (27)
  • 13
    • 0345129758 scopus 로고    scopus 로고
    • patents PCT/EP97/04589, PCT/ EP97/04582, AZ 196 34 121.3-51
    • E. Ermantraut et al., patents PCT/EP97/04589, PCT/ EP97/04582, AZ 196 34 121.3-51.
    • Ermantraut, E.1
  • 14
    • 0345129759 scopus 로고    scopus 로고
    • in preparation
    • E. Ermantraut et al., 1997, in preparation.
    • (1997)
    • Ermantraut, E.1
  • 23
    • 0345129757 scopus 로고    scopus 로고
    • University of Groningen, personal communication
    • A. Brisson, University of Groningen, personal communication.
    • Brisson, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.