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Volumn 215, Issue 4-6, 2003, Pages 251-255

Binary pure-phase filter optimized the optical distribution of solid immersion lens

Author keywords

Optical storage; Phase filter; Solid immersion lens

Indexed keywords

OPTICAL DATA STORAGE; OPTICAL FILTERS; PHOTOLITHOGRAPHY; REFRACTIVE INDEX;

EID: 0037438863     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(02)02237-X     Document Type: Article
Times cited : (12)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.