Surface acoustic wave applications of lithium niobate thin films

Applied Physics Letters

Volumn 82, Issue 2, 2003, Pages 191-193

  Lee, T C ^a   Lee, J T ^a   Robert, M A ^a,b,c   Wang, S ^b   Rabson, T A ^b  

^a Rice University   (United States)

^b RICE UNIVERSITY   (United States)

^c RICE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; DECOMPOSITION; DEPOSITION; DIAMONDS; FILM GROWTH; LITHIUM NIOBATE; MAGNETRON SPUTTERING; MULTILAYERS; SILICON; SUBSTRATES; TRANSDUCERS;

INTERDIGITAL TRANSDUCERS;

THIN FILMS;

EID: 0037434280     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1534413     Document Type: Article

References (12)

1. R. C. Williamson, Proc. IEEE Ultrasonics Symp. 1977, 460 (1977).
2. B. R. Stoner, S. R. Sahaida, J. P. Bade, P. Southworth, and P. J. Ellis, J. Mater. Res. 8, 1334 (1993).
3. H. Nakahata, A. Hichigo, S. Shikata, and N. Fujimori, Proc. IEEE Ultrasonics Symp. 1992, 377 (1992).
4. H. Nakahata, H. Kitabayashi, T. Uemura, A. Hachigo, K. Higaki, S. Fujii, Y. Seki, K. Yoshida, and S. Shikata, Jpn. J. Appl. Phys., Part 1 37, 2918 (1998).
5. R. T. Smith and F. S. Welsh, J. Appl. Phys. 42, 2219 (1971).
6. T. Nishida, R. C. Ibrahim, T. Horiuchi, T. Shiosaki, and K. Matsushige, Jpn. J. Appl. Phys., Part 1 36, 6077 (1997).
7. K.-S. Ho, J. Lin, J. Chen, and T. A. Rabson, Integr. Ferroelectr. 11, 201 (1995).
8. H. Nakahata, A. Hachigo, K. Higaki, and S. Fujii, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 42, 362 (1995).
9. J.-T. Lee, Ph.D. dissertation, Rice University, 2000.
10. S. Wang, Ph.D. dissertation, Rice University, 2000.
11. T. A. Rabson, J.-T. Lee, T.-C. Lee, S. Wang, and M. A. Robert, Integr. Ferroelectr. 41, 1733 (2001).
12. E. L. Adler, J. K. Slaboszewicz, G. W. Farnell, and C. K. Jen, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 37, 215 (1990).