Aqueous ammonium sulfide to modify the surface of low κ dielectric thin films

Colloids and Surfaces A: Physicochemical and Engineering Aspects

Volumn 214, Issue 1-3, 2003, Pages 119-126

  Senkevich, Jay J ^a   Yang, G R ^a   Lu, T M ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Ammonium sulfide; Low dielectrics; Parylene; Polymeric surfaces

Indexed keywords

ADHESION; DIELECTRIC FILMS; HYDROPHOBICITY; POLYMERS; SURFACE CHEMISTRY; THIN FILMS;

DIELECTRIC ADHESION;

SURFACE TREATMENT;

ALKENE DERIVATIVE; AMMONIUM DERIVATIVE; AMMONIUM SULFIDE; ETHER DERIVATIVE; POLYMER; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL MODIFICATION; CONTACT ANGLE; DIELECTRIC CONSTANT; FILM; GONIOMETRY; HYDROPHILICITY; HYDROPHOBICITY; PRECIPITATION; PRIORITY JOURNAL; TEMPERATURE; THICKNESS; VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0037433473     PISSN: 09277757     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-7757(02)00363-1     Document Type: Article

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