Electron-beam-induced damage in wurtzite InN

Applied Physics Letters

Volumn 82, Issue 6, 2003, Pages 859-861

  Mkhoyan, K A ^a   Silcox, J ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON MOBILITY; ELECTRONIC STRUCTURE; SEMICONDUCTING INDIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON-BEAM-INDUCED DAMAGE;

ELECTRON BEAMS;

EID: 0037428747     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1543642     Document Type: Article

References (20)

1. S. Strite and H. Morkoc, J. Vac. Sci. Technol. B 10, 1237 (1992).
2. V. Yu. Davydov, V. V. Emtsev, I. N. Goncharuk, A. N. Smirnov, V. D. Petrikov, V. V. Mamutin, V. A. Vekshin, S. V. Ivanov, M. B. Smirnov, and T. Inushima, Appl. Phys. Lett. 75, 3297 (1999).
3. H. Lu, W. J. Schaff, J. Hwang, H. Wu, G. Koley, and L. F. Eastman, Appl. Phys. Lett. 79, 1489 (2001).
4. D. A. Muller, D. J. Singh, and J. Silcox, Phys. Rev. B 57, 8181 (1998).
5. D. L. Medlin, L. E. Thomas, and D. G. Howitt, Ultramicroscopy 29, 228 (1989).
6. N. J. Zaluzec and J. F. Mansfield, Microscopy and Microanalysis (1986), p. 708.
7. D. L. Medlin and D. G. Howitt, Philos. Mag. Lett. 64, 133 (1991).
8. D. A. Muller and J. Silcox, Philos. Mag. A 71, 1375 (1995).
9. P. Regnier, N. Q. Lam, and K. H. Westmocott, Ser. Metall. 16, 643 (1982); J. Nucl. Mater. 115, 286 (1983); P. Regnier and N. Q. Lam, J. Nucl. Mater. 133-134, 423 (1985).
10. P. Regnier, N. Q. Lam, and K. H. Westmocott, Ser. Metall. 16, 643 (1982); J. Nucl. Mater. 115, 286 (1983); P. Regnier and N. Q. Lam, J. Nucl. Mater. 133-134, 423 (1985).
11. P. Regnier, N. Q. Lam, and K. H. Westmocott, Ser. Metall. 16, 643 (1982); J. Nucl. Mater. 115, 286 (1983); P. Regnier and N. Q. Lam, J. Nucl. Mater. 133-134, 423 (1985).
12. J. P. Benedict, R. Anderson, S. J. Klepeis, and M. Chaker, Mater. Res. Soc. Symp. Proc. 199, 189 (1990).
13. S. Pennycook and D. E. Jesson, Ultramicroscopy 37, 14 (1991).
14. T. J. Eustis, J. Silcox, Microscopy and Microanalysis (1999), p. 642.
15. N. F. Mott, Proc. R. Soc. London, Ser. A 124, 426 (1929); 135, 429 (1932).
16. N. F. Mott, Proc. R. Soc. London, Ser. A 124, 426 (1929); 135, 429 (1932).
17. H. Feshbach, Phys. Rev. 103, 1597 (1956).
18. C. R. Bradley, Calculations of Atomic Sputtering and Displacement Cross-Sections in Solid Elements by Electrons with Energies from Threshold to 1.5 MV, Report No. ANL-88-48, 1988.
19. W. A. Harrison, Electronic Structure and the Properties of Solids (Dover, New York, 1989), p. 176.
20. R. F. Egerton, Electron Energy Loss Spectroscopy in the Electron Microscope (Plenum, New York, 1996).