The influence of a hot cathode vacuum gauge on the residual gas composition

Vacuum

Volumn 70, Issue 4, 2003, Pages 523-530

  Nemanič, Vincenc ^a   Žumer, Marko ^a   Zajec, Bojan ^a  

^a Institute of Surface Engineering and Optoelectronics Ljubljana   (Slovenia)

Author keywords

Hot cathode ionisation gauge; Hydrogen background; Outgassing; Quadrupole mass spectrometry; Residual atmosphere

Indexed keywords

CATHODES; GASES; IONIZATION; MASS SPECTROMETRY; ULTRAHIGH VACUUM;

HOT CATHODE GAUGES (HCG); RESIDUAL ATMOSPHERE;

VACUUM GAGES;

EID: 0037418744     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00780-7     Document Type: Article

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