Observation of a localized electron beam in large-area microwave discharge

Applied Physics Letters

Volumn 82, Issue 5, 2003, Pages 694-696

  Terebessy, Tibor ^a   Širý, Milan ^a   Kando, Masashi ^a   Kudela, Jozef ^b   Korzec, Dariusz ^c  

^a SHIZUOKA UNIVERSITY   (Japan)

^b Canon ANELVA Technix Corporation   (Japan)

^c UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DIFFUSION; IONIZATION; MICROWAVES; PARAMETER ESTIMATION; PLASMA DENSITY; QUARTZ;

MICROWAVE DISCHARGES;

ELECTRON BEAMS;

EID: 0037415923     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1543250     Document Type: Article

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