Preparation and characterization of (Ba, Sr)TiO3 thin films using interdigital electrodes

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 872-879

  Cheng, Y L ^a   Wang, Y ^a   Chan, H L W ^a   Choy, C L ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

Barium strontium titanate; Ferroelectric; Film; Interdigital

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; CAPACITORS; PERMITTIVITY;

INTERDIGITAL ELECTRODES;

FERROELECTRIC THIN FILMS;

EID: 0037391737     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)01014-6     Document Type: Conference Paper

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