Ferroelectric PbTiO3 thin films prepared by electrostatic spray deposition (ESD)

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 688-694

  Huang, Hui ^a   Yao, Xi ^a   Wu, Xiaoqing ^a   Wang, Minqing ^a   Zhang, Liangying ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Electrostatic spray deposition; Ferroelectric; PbTiO3; Thin films

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; DEPOSITION; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; PEROVSKITE; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ELECTROSTATIC SPRAY DEPOSITION (ESD);

THIN FILMS;

EID: 0037391722     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00984-X     Document Type: Conference Paper

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