Effect of the relaxation of the electron subsystem excitation in metals on the ionization probability of sputtered atoms

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 203, Issue , 2003, Pages 172-177

  Belykh, S F ^a   Palitsin, V V ^a   Adriaens, A ^b   Adams, F ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b GHENT UNIVERSITY   (Belgium)

Author keywords

Electron subsystem excitation; Ion metal interaction; Ionization probability; Relaxation; Secondary ion emission; Semi empirical model; Sputtering

Indexed keywords

ATOMS; ELECTRONS; PROBABILITY; SPUTTERING;

SECONDARY ION EMISSION;

IONIZATION;

EID: 0037389104     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)02213-9     Document Type: Conference Paper

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