High-speed and precise positioning of an X-Y table

Control Engineering Practice

Volumn 11, Issue 4, 2003, Pages 357-365

  Tseng, Yih Tun ^a   Liu, Jui Hung ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

High speed control; Micro dynamics; Precise positioning; Tuning control; X Y table

Indexed keywords

MACHINERY; MANUFACTURE; SERVOMECHANISMS;

POSITIONING;

POSITION CONTROL;

CONTROL SYSTEM; HIGH SPEED; INDUSTRIAL APPLICATION; MANUFACTURING SYSTEM; PRECISION; PROCESS CONTROL;

EID: 0037387450     PISSN: 09670661     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0967-0661(02)00109-0     Document Type: Article

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