Resolution limit of probe-forming systems with magnetic quadrupole lens triplets and quadruplets

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 201, Issue 4, 2003, Pages 637-644

  Ponomarev, A G ^a   Melnik, K I ^a   Miroshnichenko, V I ^a   Storizhko, V E ^a   Sulkio Cleff, B ^b  

^a INSTITUTE OF APPLIED PHYSICS   (Ukraine)

^b UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

Emittance; Magnetic quadrupole lens; Optimization; Probe forming system

Indexed keywords

ELECTRIC CURRENTS; ELECTROSTATIC ACCELERATORS; ION BEAMS; ION SOURCES; MICROANALYSIS; OPTIMIZATION; PROBES;

MAGNETIC QUADRUPOLE LENS;

MAGNETIC LENSES;

EID: 0037379128     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)02229-2     Document Type: Article

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