Volumetric phase-measuring interferometer for three-dimensional coordinate metrology

Precision Engineering

Volumn 27, Issue 2, 2003, Pages 205-215

  Kim, Seung Woo ^a   Rhee, Hyug Gyo ^a   Chu, Ji Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Abbe offset; Coordinate metrology; Multilateration; Phase measuring interferometry; Volumetric interferometer

Indexed keywords

COORDINATE MEASURING MACHINES; KINEMATICS; PHASE SHIFT; PHOTODETECTORS;

VOLUMETRIC INTERFEROMETERS;

INTERFEROMETERS;

EID: 0037377531     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(02)00228-3     Document Type: Article

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