Nano-scratch study of molecular deposition films on silicon wafers using nano-indentation

TriboTest

Volumn 9, Issue 3, 2003, Pages 231-237

  Deguo, Wang ^a   Siwei, Zhang ^a   Manglai, Gao ^a  

^a CHINA UNIVERSITY OF PETROLEUM   (China)

Author keywords

Critical load; Friction; MD films; Molecular deposition; Nano indentation; Silicon wafer

Indexed keywords

FRICTION; INDENTATION; MOLECULAR DYNAMICS; NANOTECHNOLOGY; SILICON WAFERS;

NANO-INDENTATION;

ULTRATHIN FILMS;

EID: 0037366448     PISSN: 13544063     EISSN: None     Source Type: Journal    
DOI: 10.1002/tt.3020090306     Document Type: Article

References (5)

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3. Wang, Q.B., Gao, M.L., and Zhang, S.W., Tribological application of molecular deposition (MD) films', Mater. Sci. Eng. C, 10 (1999) 127.
4. Deng, H., and Barnard, J.A., 'Determining critical loads for ultrathin overcoats using depth sensing nano-indentetion multiple sliding technique', IEEE Trans. Magn., 33, 5 (1997) 3151.
5. Deng, H., Scharf, T.W., and Barnard, J.A., 'Adhesion assessment of silicon carbide, carbon, and carbon nitride ultrathin overcoats by nanoscratch techniques', J. Appl. Phys., 81, 8 (1997) 1.