Capacitive micro pressure sensors with underneath readout circuit using a standard CMOS process

Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an

Volumn 26, Issue 2, 2003, Pages 237-241

  Dai, Ching Liang ^a   Chang, Shih Chen ^b   Lee, Chi Yuan ^c   Cheng, Ying Chou ^c   Chang, Chien Liu ^b   Chiou, Jing Hung ^b   Chang, Pei Zen ^b  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

A single chip; Capacitive micropressure sensor; CMOS; Readout circuit

Indexed keywords

ANISOTROPY; CAPACITORS; CMOS INTEGRATED CIRCUITS; COUPLED CIRCUITS; DRY ETCHING; ELECTRIC INVERTERS; FLIP FLOP CIRCUITS; MICROELECTRONIC PROCESSING; NITRIDES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRESSURE MEASUREMENT; READOUT SYSTEMS;

CAPACITIVE MICROPRESSURE SENSOR; READOUT CIRCUIT; WET ETCHING;

MICROSENSORS;

EID: 0037352122     PISSN: 02533839     EISSN: 21587299     Source Type: Journal    
DOI: 10.1080/02533839.2003.9670774     Document Type: Article

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