Microfabrication of LiCoO2 film using liquid source misted chemical deposition technique

Solid State Ionics

Volumn 159, Issue 1-2, 2003, Pages 25-34

  Kim, Ki Woong ^a   Woo, Seong Ihl ^a   Choi, Kang Hong ^b   Han, Kyoo Seung ^a   Park, Yong Joon ^c  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Chungnam National University   (South Korea)

^c Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

LiCoO2 film; Liquid source misted chemical deposition; Lithium rechargeable microbattery

Indexed keywords

ATOMIZATION; COMPOSITION EFFECTS; CRYSTALLIZATION; ELECTRIC BATTERIES; ELECTRIC DISCHARGES; ELECTROCHEMISTRY; ETHYLENE; GLYCOLS; HEAT TREATMENT; LITHIUM COMPOUNDS; PHASE TRANSITIONS; SUBSTRATES;

MICROFABRICATION;

THIN FILMS;

EID: 0037342461     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-2738(03)00026-2     Document Type: Article

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