The effect of excimer laser etching on thin film diamond

Semiconductor Science and Technology

Volumn 18, Issue 3, 2003, Pages

  Chan, Simon S M ^a   Whitfield, Michael D ^a   Jackman, Richard B ^a   Arthur, Graham ^b   Goodall, Francis ^b   Lawes, Ronald A ^b  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

^b RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ETCHING; EXCIMER LASERS; METALLIZING; PARAMETER ESTIMATION; RAMAN SCATTERING; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; THIN FILMS;

RAMAN MICROPROBE ANALYSIS;

DIAMOND FILMS;

EID: 0037340374     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/18/3/307     Document Type: Article

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