Chemical compositional mapping by microbeam analysis at the micrometer scale and finer

Microelectronics Journal

Volumn 28, Issue 4 SPEC. ISS., 1997, Pages 489-508

  Newbury, Dale E ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001666680     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2692(96)00073-0     Document Type: Article

References (19)

1. J.I. Goldstein, D.E. Newbury, P. Echlin, D.C. Joy, C.E. Fiori and E. Lifshin, Scanning Electron Microscopy and X-ray Microanalysis, 2nd edn, Plenum Press, New York, 1992.
2. D.E. Newbury, D.C. Joy, P. Echlin, C.E. Fiori and J.I. Goldstein, Advanced Scanning Electron Microscopy and X-ray Microanalysis, Plenum Press, New York, 1986.
3. D.E. Newbury, Microanalysis to nanoanalysis: measuring composition at high spatial resolution, Nanotechnology, 1 (1990) 103.
4. Scientific American, 'Diminishing Dimensions', 1990.
5. J. Bryzek, K. Petersen and W. McCulley, Micromachines on the march, IEEE Spectrum (1994) 20.
6. D.B. Wittry, Spectroscopy in microscopy and microanalysis: the search for an ultimate analytical technique, in P. Brederoo and V.E. Cosslett (eds), Electron Microscopy - 1980, Proc. 7th European Congress Electron Microscopy, Leiden, 1980, pp. 14-21.
7. C.R. Brundle, C.A. Evans Jr and S. Wilson (eds), (1992) Encyclopedia of Materials Characterization, Butterworth-Heinemann, Boston, 1992.
8. M. Grasserbauer and H.W. Werner (eds) Analysis of Microelectronic Materials and Devices, Wiley, New York, 1991.
9. E. Fuchs, H. Oppolzer and H. Rehme, Particle Beam Microanalysis, VCH, New York, 1990.
10. R. Castaing, Ph.D. Thesis, University of Paris, 1951.
11. K.F.J. Heinrich and D.E. Newbury (eds) Electron Probe Quantitation, Plenum Press, New York, 1991.
12. K.F.J. Heinrich and H. Yakowitz, Anal. Chem., 47, (1975) 2408.
13. D.E. Newbury, C.E. Fiori, R.B. Marinenko, R.L. Myklebust, C.R. Swyt and D.S. Bright, Compositional mapping with the electron probe microanalyzer: Part I, Anal. Chem., 62 (1990a) 1159A.
14. D.E. Newbury, C.E. Fiori, R.B. Marinenko, R.L. Myklebust, C.R. Swyt, and D.S. Bright, Compositional mapping with the electron probe microanalyzer: Part II, Anal. Chem., 62 (1990b) 1245A.
15. D.S. Bright and D.E. Newbury, Anal. Chem., 63 (1991) 243A.
16. D.C. Joy, A.D. Romig Jr and J.I. Goldstein, Principles of Analytical Electron Microscopy, Plenum Press, New York, 1986.
17. M.K. Kundmann and O.L. Krivanek, Micros. Microanal. Microstruct., 2 (1991) 245.
18. R.D. Leapman and D.E. Newbury, Analyt. Chem., 65 (1993) 2409.
19. D.S. Bright, R.B. Mannenko and S. Bernik, Microbeam Analysis, (1994) 203.